Deposition and Epitaxy Studies

Some Published Papers
Applications of Hiden RGA QMS Systems

A)  Chemical Beam Epitaxy (CBE)

M1

Schiff Base Percursor Compounds for the Chemical Beam Epitaxy of Oxide Thin Films.
Part I: Deposition of CuO on Mg0[001] Using Copper (II) Bis(benzoylacetone) ethylendiimine.
E Fritsch 1 , E Machler 2 , F Arrouy 1 , H Berke 1 , I Povey 3 , P R Wilmott 3 and J P Locquet 2
1 Institute of Inorganic Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
2 IBM Reseach Division, Zurich Research Laboratory, CH-8803 Ruschlikon, Switzerland
3 Institute of Physical Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
Submitted to J. Vac, Sci. Technol . A (April 17, 1996)

M2

Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films.
E Fritsch 1 , E Machler 2 , F Arrouy 1 ,O Orama3, H Berke 1 , I Povey 4 , P R Wilmott 4 and J P Locquet 2
1 Institute of Inorganic Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
2 IBM Reseach Division, Zurich Research Laboratory, CH-8803 Ruschlikon, Switzerland
3 V.T.T. Chemical Technology, SF-02044 VTT, Finland
4 Institute of Physical Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
Submitted to Chemistry of Materials (April 16, 1996)


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