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Deposition and Epitaxy Studies
Some Published Papers
Applications of Hiden RGA QMS Systems |
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A) Chemical Beam Epitaxy (CBE) |
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M1 |
Schiff Base Percursor Compounds for the Chemical Beam Epitaxy of Oxide Thin Films.
Part I: Deposition of CuO on Mg0[001] Using Copper (II) Bis(benzoylacetone) ethylendiimine.
E Fritsch 1 , E Machler 2 , F Arrouy 1 , H Berke 1 , I Povey 3 , P R Wilmott 3 and J P Locquet 2
1 Institute of Inorganic Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
2 IBM Reseach Division, Zurich Research Laboratory, CH-8803 Ruschlikon, Switzerland
3 Institute of Physical Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
Submitted to J. Vac, Sci. Technol . A (April 17, 1996) |
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M2 |
Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films.
E Fritsch 1 , E Machler 2 , F Arrouy 1 ,O Orama3, H Berke 1 , I Povey 4 , P R Wilmott 4 and J P Locquet 2
1 Institute of Inorganic Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
2 IBM Reseach Division, Zurich Research Laboratory, CH-8803 Ruschlikon, Switzerland
3 V.T.T. Chemical Technology, SF-02044 VTT, Finland
4 Institute of Physical Chemistry, University of Zurich, CH-8057 Zurich, Switzerland
Submitted to Chemistry of Materials (April 16, 1996) |
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