The Hiden SIMS system is now optionally offered in two versions – a complete standalone Workstation or a compact bolt-on module for cluster tool integration. The system provides a fully-featured, cost-effective, high performance analytical tool for diverse sample types including alloys, multilayer devices, semiconductors, polymers and pharmaceuticals.

The multiport UHV analysis chamber incorporates a high-resolution quadrupole mass spectrometer with mass ranges to 1000 amu, choice of ion gun with oxygen, inert gas or liquid metal sources, and fast atom and electron flood guns for insulating samples. The system includes a fast-entry load lock, specimen transfer mechanism and precision sample manipulator stage to ensure optimum throughput for all sample types. Additional mounting ports enable system expansion for multiple surface analysis techniques and user customisation.

Features include integrated ion gun raster control, data acquisition, spectral display and ESM Surface Imaging programs for 2D/3D elemental mapping and depth profiling, with part-per-billion sensitivity and depth resolution to 5 nanometres. The analysis sequence is programmable to provide measurement of positive ions, negative ions and neutral species within single or multiple measurement cycles, automatically and without user intervention.

The components are additionally available for SIMS upgrades to existing surface analysis systems..